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Determination of Optimal Design Level for the Semiconductor Polishing Process by Taguchi Method
Hyun Su Sim, Yong Soo Kim
J Korean Soc Qual Manag. 2017;45(2):293-306.   Published online June 30, 2017
DOI: https://doi.org/10.7469/JKSQM.2017.45.2.293
                                    
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